Development of microbolometer with high fill factor and high mechanical stability by shared-anchor structure

摘要

For the development of small microbolometer for mobile applications, new pixel design to enhance fill factor by sharedanchor structures is suggested and it can be possible to make a one anchor per unit pixel. Fill factor increases 10% more than that of normal unshared-anchor design. Amorphous-silicon based microbolometer has been fabricated with 64x64 arrays of 25um pixel size to verify proposed design. Mechanical flatness of shared-anchor structure is enhanced. Responsivity is enhanced from 1.08e+5 V/W to 1.23e+5 V/W due to the increase of fill-factor compared to unsharedanchor. There are no mechanical, electrical and thermal crosstalk problems with adjacent pixels.