ANALYSIS OF INDENTER GEOMETRY VERIFICATION DATA BY MEANS OF THE REGRESSION PLANE FITTING

摘要

An analytical method of the geometrical parameters of hardness indenters from bitmap data obtained AFM, etc. is introduced. The method is based on the fitting to the analytical geometric shape by the least square method. The results of the analysis are not influenced by human factors which are usually included in the operation of analyzing software's GUI. Examples of analytical results are shown with the estimation of the uncertainty of measurement. The uncertainty is estimated considering the uncertainty of AFM itself and the misfit of plan regression, and the uncertainty of facet angles, interior angles of the square base of the pyramid and the area function are evaluated for nano-range Vickers indenters through the propagation of error. There are some suggestions that some of the geometrical requirements in ISO 14577 may not practical when the verification process is considered.