High-Angular-Resolution Microbeam X-Ray Diffraction with CCD Detector

摘要

We have introduced a CCD-type two-dimensional X-ray detector for a microbeam X-ray diffraction system using synchrotron radiation, so that we can measure local reciprocal space maps (RSM) of samples rapidly. A local RSM of a strain-relaxed SiGe 004 grown on a Si (001) substrate was measured in higher-angular-resolution and faster than a conventional way. The measurement was achieved in 1 h 40 min. with the 20 resolution of 80 grad and the spatial resolution of 1.4 (h) x 0.5 (v) μm~2. The introduction of the CCD enabled us to measure RSMs at many points in a sample, that is, the distribution of strain fields and lattice tilts can be revealed in high-angular- and high-spatial-resolution.