Optical fiber Fabry-Perot acoustic sensor based on large PDMS diaphragm

摘要

An extrinsic Fabry-Perot interferometric fibre microphone based on polydimethylsiloxane, or PDMS, diaphragm was proposed. The large free-standing PDMS diaphragm, with a diameter of 4 mm, is prepared by a simple "spin-strip" process. The experimental result shows that the fabricated sensor has a high dynamic pressure sensitivity of about -136 dB re 1 rad/μPa in the range of 100～2000Hz. The noise equivalent acoustic signal level of the microphone, limited by the environmental noise, is about 1000 μPa/Hz~(1/2). And the dynamic range is tested to be more than 47.48 dB. The proposed microphone is expected to be used in the field of weak acoustic pressure testing.