Thermo-mechanical analysis of uncooled La_(0.67)Sr_(0.33)MnO_3 microbolometer made on circular SOI membrane

摘要

We report on thermal analysis of uncooled antenna-coupled La_(0.67)Sr_(0.33)MnO_3 microbolometer made on circular SOI membrane with no limitation in its active area (circular membrane with diameter up to 2 500 μm). A simple method how to investigate the thermal conversion efficiency (thermal resistance value) is introduced. Thermal analysis is supported by the ANSYS modelling and simulation. It is found that R_(th) of our LSMO bolometer (bolometer sensitivity) can be tuned by the SOI membrane thickness. R_(th) of the bolometer as high as 164°C/mW is estimated from the thermal simulation for SOI membrane with the thickness of 300 nm.