This paper reports on a continuously tunable MEMS capacitor with a wide tuning range of 5:1, high quality factor of better than 100 (at 1 GHz) at each tuned state, and self-resonance frequency of more than 13.5 GHz. The temperature stability of the capacitance in the temperature range of -50°C to 60°C is better than 7%, which is one of the best reported for continuously tuned capacitors. The maximum tuning speed of the capacitor is measured to be better than 40 μsec.
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