Spatially Arranged Microelectrodes using Wire Bonding Technology for Spatially Distributed Chemical Information Acquision

摘要

This paper presents spatially arranged microelectrodes to allow real-time monitoring of behavior of spatially distributed chemical. Out-of-plane microelectrodes standing on a substrate with gradation in height are developed for the purpose. Wire-bonding-based probe technology [1] makes it possible to provide spatially arranged microelectrodes. The wire-bonding-based probe technology combines wire bonding and laser machining. Bonded metal wires are converted to probe arrays by cutting the bridge. Spatially arranged microelectrodes can detect spatially distributed chemical in real time would understand various phenomena caused by spatially distributed chemical. This paper demonstrates spatially arranged microelectrodes could be used as the working electrodes of spatially electrochemical sensors in chronoamperometric measurements using K3Fe (CN)6.