THREE-DIMENSIONAL IN VIVO REAL TIME IMAGING BY A MINIATURE DUAL-AXES CONFOCAL MICROSCOPE BASED ON A TWO-DIMENSIONAL MEMS SCANNER

摘要

We demonstrate a novel microelectromechanical system (MEMS) based Dual-Axes confocal (DAC) microscope in a 10-mm diameter handheld package. Miniaturization is achieved by using a barbell-shaped, gimbaled, two-dimensional (2-D) MEMS scanner that is actuated by self-aligned vertical comb actuators. The maximum DC optical scan angles are ±4.25° on the inner axis and ±1.5° on the outer axis, and the Corresponding resonance frequencies are 3.4kHz and 1.2kHz. The maximum imaging rate is 5 frames/second. The miniature DAC microscope operating at 785-nm-wavelength achieves full-width-half-maximum (FWHM) transverse and axial resolutions of 4.2μm and 7μm, respectively.