MINIATURE ULTRASOUND ACOUSTIC IMAGING DEVICES USING 2-D PMUTS ARRAY ON EPITAXIAL PZT/SrRuO_3/Pt/γ-Al_2O_3/Si STRUCTURE

摘要

In this paper, we demonstrate ultrasound acoustic imaging using a miniature 2-D piezoelectric micromachined ultrasonic transducers (pMUTs) array on an epitaxial PZT/SrRuO_3(SRO)/Pt/γ-Al_2O_3/Si structure for the first time. 2-D pMUTs arrays containing 64 ch (8 × 8 arrays) with 100 μm-diameter circle shape element were fabricated. Detection properties of ultrasonic were measured in water with a ceramics PZT transducer as a point ultrasonic source. The epitaxial structure indicates higher sensitivity than the conventional SiO_2/Si structure. 2-D acoustic images for acrylic targets were successfully observed using pMUTs array, which shows potentials for high resolution 3-D acoustic imaging.