3-D MICROCOILS AS A METAMATERIAL WITH ELECTRIC AND MAGNETIC RESPONSE

摘要

This paper reports a terahertz metamaterial consisting of 3-D microcoils fabricated with an automatic wire bonder in a fully MEMS-compatible manner. The response of the system to an incident electromagnetic wave was characterized by terahertz time-domain spectroscopy (TDS) and by numerical simulations. Depending on the light polarization relative to the structure, fundamental and higher order electric or magnetic resonances were excited in the coils.