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Diamond Pad Conditioners with Oriented Polycrystalline Diamond Cubes

机译:钻石垫条件,具有面向多晶钻石立方体

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摘要

Sintered polycrystalline diamond cubicles were oriented to make CMP pad conditioners. The dressing experiments demonstrated the capability of fast pad cutting and efficient removal of glazed layer that is formed by polishing wafers with slurry on dressed pad.
机译:取向烧结多晶金刚石小隔间以使CMP焊盘调节剂。敷料实验证明了快速焊盘切割和高效除去釉面层,其通过磨损垫上抛光晶圆形成。

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