DEVELOPMENT OF THE PRIMARY NANOPARTICLE MEASUREMENT STANDARD BY THE ELECTRO-GRAVITATIONAL AEROSOL BALANCE

摘要

Nanoparticle characterization has been critical in semiconductor industry, as the feature size of IC continuously shrinks to increase the density of chips in one circuit. The standardization and metrology of nanoparticle characterization are important areas of metrology, though they can be difficult because nanoscale resolution is frequently required. In order to characterize the nanoparticles in nanoscale accuracy, metrology tools are required to detect and analyze these nanoparticles for identifying the sources of the contamination. However, due to lack of calibration standards, inconsistent measurement results are observed for nanoparticle characterizations while different measurement techniques were used [1]. Therefore, in order to accurately and consistently determine the sizes of the nanoparticles, establishments of measurement standards in nanometer range become crucial and necessary.