Non-Piezoelectric Resonant Acoustic Sensors: Electromagnetic Excitation as an Alternative Transducer Principle

摘要

Resonant acoustic sensors are traditionally based on the piezoelectric effect. More recently, capacitive micromachined transducer (CMUT) and film bulk acoustic resonator (FBAR) technologies featuring alternative transduction mechanisms have been investigated. Our research has recently dealt with different possibilities of electromagnetic excitation based on the utilization of Lorentz forces in acoustic resonator elements, thus avoiding the necessity of piezoelectric materials. In this contribution we present three selected sensor elements for different applications and associated recent experimental results.