Micro-Electromechanical Devices for RF Voltage Metrology Applications

摘要

In this paper micro-electromechanical sensors have been developed for high-frequency voltage metrology applications, that should ultimately allow RF to DC voltage transfer. In this contribution an overview of the theoretical foundation of this work and of practical devices is given. In the context of RF voltage metrology, the different possible types of measurements, the choice of geometrical structures, and the resulting challenges for a micro-mechanical fabrication process are highlighted. Fabricated devices are presented and are related to other research in this area.