For the HapCath - haptic catheter - project, small piezoresistive force sensors with a size of 200(centre dot)220(centre dot)640 (mu)m~(3) have been developed. They are used for the measurement of forces at the tip of guide wires during catheterizations. The sensor body is realized by anisotropic wet etching of monocrystalline silicon and wafer sawing. The requirements on the sensor, the mechanical structure and the working principle will be presented. First measurement results are given revealing a transfer coefficient of about 284 mV(centre dot)(N(centre dot)mA)~(-1).
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