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Vapor-Lithography

机译:蒸汽光刻

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摘要

This paper introduces a novel method using water vapor to produce micro cupolated wells which shape is not possibly fabricated by conventional photolithography. Countless number of micro-and nano- droplets was collected on substrates and frozen (instead of baked) to produce micro well patterns. Vapor collecting time and hydrophilicity of the substrate were found to be major, determinants to control the size and shape of the micro droplets and so the patterned micro wells. Because we used water vapor for the fabrication, we named this method 'vapor-lithography'. For demonstration, we fabricated a simple device using vapor-lithography and applied it for trapping fibroblasts.
机译:本文介绍了一种使用水蒸气产生微载体孔的新方法,其形状不可通过常规光刻法制造。在基材上收集无数数量的微液体和冷冻(代替烘焙)以产生微孔图案。发现蒸气收集时间和底物的亲水性是主要的,决定簇控制微液滴的尺寸和形状等图案化的微孔。因为我们使用水蒸气来制造,所以我们将此方法命名为“蒸汽光刻”。为了演示,我们使用蒸汽光刻制造了一个简单的装置,并施加用于捕获成纤维细胞。

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