THERMAL PROPERTIES OF NANOSCALED MULTILAYER FILMSDEPOSITED ON SUBSTRATES CHARACTERIZED BY TRANSIENT GRATING TECHNIQUE

摘要

The thermal diffusivities of bilayer thin films with thicknesses of tens and/or hundredsnm deposited on substrates are characterized by a transient grating method. Based on a transientgrating experiment, a 2-dimensional thermoelastic model and eigenfunction expansion method areused to calculate the thermal fields in the multilayered structures. By fitting the theoretical calculationsto the experimental data, the diffusivities of both deposited layered thin films can be evaluatedsimultaneously.