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Estimation of Energy Loss and Electrical Resistance of Piezoelectric Resonator Structures by an Energy Sink Method

机译:通过能量水槽方法估计压电谐振器结构的能量损失和电阻

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The quartz resonator is the most common piezoelectric resonating structure designed to provide a stable frequency source for electronic devices and applications. An important figure of merit for the quartz resonator structure is the quality factor Q which measures the “sharpness” of its frequency response curve and its frequency stability. This quality factor Q is inversely proportional to the energy loss per cycle of oscillation. The Q is hence also inversely proportional to the resonator resistance or impedance. Currently there are no analytical tools for estimating the Q without an apriori assumption of the resonator damping or impedance. In order to get good numerical agreement with the measured data, all the current finite element software requires an assumption of either the resonator resistance or resonator Q value. We propose and present a new analytical tool for estimating the quartz resonator Q and other figures of merit by an energy sink method. Results for the thickness shear mode, AT-cut quartz resonators are presented. Experimentally measured material constants of mechanical dissipation and conductivity of quartz was included in our models. Our energy sink method is more realistic than assuming the crystal impedance or Q. One of the most important factors affecting the Q in the design of a new quartz resonator structure of a given frequency is the loss of energy from the electrode area to the base via the mounting supports. The acoustical characteristics of the plate resonator are changed when the plate is mounted onto a base. This is analogous to a soil-structure interaction problem with a semi-infinite boundary. The substrate base affects the frequency spectra of the plate resonator. A resonator with a high Q may not have a similarly high Q when mounted on a substrate base; hence the base is an energy sink. We present the frequency spectra of the quartz resonator with and without the substrate base. A scaled boundary finite element method is employed to model a semi-infinite base. Since a semi-infinite base will absorb all acoustical energies radiated from the resonator, a forced vibration analysis of such a model will provide the lower bound Q values. The model with a semi infinite base could be used for evaluating resonator and mountings designs. The effect of the mountings, plate and electrode geometries on the resonator Q and other figures of merit are presented. Comparisons of the experimental measurements of the admittance and Q with the simulated results using the semi-infinite energy sink method were performed. The measured admittance compared very well with the simulated results. The measured Q showed the same trend as the simulated Q.
机译:石英谐振器是最常见的压电谐振结构,其设计用于为电子设备和应用提供稳定的频率源。石英谐振器结构的重要价值是质量因子Q,其测量其频率响应曲线的“清晰度”及其频率稳定性。这种质量因子Q与每个振荡循环的能量损失成反比。因此,Q也与谐振器电阻或阻抗成反比。目前,没有用于估计Q的分析工具,而无需谐振器阻尼或阻抗的APRiori假设。为了使测量数据获得良好的数值协议,所有当前的有限元件都需要假设谐振器电阻或谐振器Q值。我们提出并提出了一种新的分析工具,用于通过能量水槽方法估计石英谐振器Q和其他物品图。提出了厚度剪切模式的结果,提出了AT-CUT石英谐振器。我们的模型中包含实验测量的石英机械耗散和导电性的材料常数。我们的能量水槽方法比假设晶体阻抗或Q.在给定频率的新石英谐振器结构的设计中影响Q的最重要因素之一是从电极区域到基座的能量丢失安装支撑。当板安装到基座上时,板谐振器的声学特性被改变。这类似于半无限边界的土壤结构相互作用问题。基板基底影响板谐振器的频谱。当安装在基板底座上时,具有高Q的谐振器可能没有类似的高Q;因此,底座是一个能量下沉。我们介绍了用基底基底的石英谐振器的频谱。采用缩放边界有限元方法来模拟半无限基础。由于半无限基座将吸收从谐振器辐射的所有声学能量,因此这种模型的强制振动分析将提供下限的Q值。具有半无限基座的模型可用于评估谐振器和安装件设计。提出了安装,板和电极几何形状的效果。提出了谐振器Q和其他优点图。进行了使用半无限能量水槽方法的燃烧率和Q的实验测量的比较。测量的导纳与模拟结果相比非常好。测量的Q显示与模拟Q相同的趋势。

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