MEMS Ultrasonic Sensor Array with Thick Film PZT Transducers

摘要

Thick-film piezoelectric transducers have been studied widely in the past years. However the limitations in fabrication obstruct the use in actuators and sensors. Especially the alignment, the reproducibility and structure sizes are limited. This paper suggests a new approach to fabricate thick-film piezoelectric transducer arrays with photolithographic alignment and much smaller structure sizes. The array is intended for sonic beam forming in sensing applications for fluidics in channels at millimeter or micrometer scale. The applications are flow rate measurement, detection of particles or bubbles or monitoring of fluidic properties. As a result is a 4×4 transducer array on a silicon membrane is introduced and characterized.