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Effects of residual stresses on mechanical properties of segmented micro deformable mirrors

机译:残余应力对分段微可变形镜机械性能的影响

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Effects of residual stresses on mechanical properties such as voltage vs. displacement response, pull-in voltage and structural resonant frequency of segmented micro deformable mirrors were investigated with both finite element method (FEM) and analytical method. A simplified model was adopted to study the structural spring constant on the existence of residual stress and two methods for imposing residual stress on structures were utilized for the purpose. Both results of analytical method and FEM show that larger structural spring constant can be obtained by introducing tensile residual stress. Consequently, mechanical properties relevant to spring constant are also greatly affected. The higher the tensile residual stress is, the stronger the structural stiffness will be. That means in order to induce the same structural displacement of mirror plate as stress-free state, higher voltage is demanded. Meanwhile, with higher tensile residual stress, larger pull-in voltage and greater structural resonant frequency are achieved. For the situation of compressive residual stress, totally the opposite influences can be observed. In conclusion, residual stress (no matter tensile or compressive) can greatly affect the mechanical properties of segmented micro deformable mirrors. Accurate control of it is needed for optimizing the structural design and improving the performance of devices.
机译:采用有限元法(FEM)和分析方法,研究了残余应力对诸如电压与位移响应的机械性能的效果,包括分段微可变形反射镜的拉伸电压和结构谐振频率。采用简化模型来研究结构弹簧常数对残余应力的存在,并利用了两种对结构施加残余应力的方法。分析方法和有限元的两个结果表明,通过引入拉伸残余应力,可以获得较大的结构弹簧常数。因此,与弹簧常数相关的机械性能也受到很大影响。拉伸残余应力越高,结构刚度越强。这意味着为了引起与无应力状态相同的镜板结构位移,需要更高的电压。同时,具有更高的拉伸残余应力,实现了较大的拉伸电压和更大的结构谐振频率。对于压缩残余应力的情况,可以观察到完全相反的影响。总之,残余应力(无论拉伸或压缩)都能大大影响分段微变形镜的机械性能。需要精确控制,以优化结构设计和提高设备性能。

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