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Flatness and Diffractive Wavefront Measurement of Liquid Crystal Computer-generated Hologram Based on Photoalignment Technology

机译:基于光艺技术的液晶计算机产生全息图的平坦度和衍射波前测量

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Interferometry with computer-generated hologram (CGH) has been widely used in the field of precision optical testingand metrology. CGH can easily generate reference wavefronts of any desired shape by controlling the phase of thediffracted light. Traditional CGH is made by etching a specific pattern on a substrate, whose cost is extremely high andthe phase of the diffraction wavefront is sensitive to the changes in etching depth. Based on photoalignment technology,liquid crystal (LC) can be fabricated into LC-CGH. The LC phase modulation elements made by this technology havethe advantage of low cost and high accuracy. The existing phase modulation elements based on photoalignmenttechnology are mostly qualitative phase controller, such as LC-grating and LC-wave plate. They are rarely used in highprecision applications. In the field of optical testing, the high precision of diffractive wavefront of LC-CGH is critical.The wavefront changes due to phase retardation in adjacent areas of LC-CGH is affected by the flatness of the LC film.Therefore, it is essential to keep the surface of the LC-CGH flat. In this paper, we measure the surface flatness and thediffraction wavefront of the LC-CGH to verify the feasibility of LC-CGH in optical testing. First, we introducephotoalignment technology and analyze the principle of LC-CGH. Second, we measure the surface flatness of LC-CGH.In the end, we evaluate the transmitted diffraction wavefront. The results can provide guidance for the LC-CGH processimprovement.
机译:具有计算机生成的全息图(CGH)的干涉测量已广泛用于精密光学测试领域和计量。 CGH可以通过控制阶段来容易地产生任何所需形状的参考波前沿衍射光。通过在基板上蚀刻特定图案来制造传统的CGH,其成本非常高,并且衍射波前的阶段对蚀刻深度的变化敏感。基于光艺技术,液晶(LC)可以制造成LC-CGH。通过该技术制作的LC相调制元件成本低的优点和高精度。基于光艺的现有相位调制元素技术大多是定性相位控制器,如LC光栅和LC波片。它们很少在高处使用精密应用。在光学测试领域,LC-CGH的衍射波的高精度至关重要。由于LC-CGH的相邻区域中的相位延迟,波前改变了LC-CGH的相邻区域受LC膜的平坦度的影响。因此,必须保持LC-CGH平面的表面。在本文中,我们测量表面平坦度和LC-CGH的衍射波前,以验证LC-CGH在光学测试中的可行性。首先,我们介绍光艺技术并分析LC-CGH的原理。其次,我们测量LC-CGH的表面平整度。最后,我们评估传输的衍射波前。结果可以为LC-CGH过程提供指导改进。

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