首页> 外文会议>Society of Photo-Optical Instrumentation Engineers;International Symposium on Advanced Optical Manufacturing and Testing Technologies;Chinese Optical Society >Flatness and Diffractive Wavefront Measurement of Liquid Crystal Computer-generated Hologram Based on Photoalignment Technology
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Flatness and Diffractive Wavefront Measurement of Liquid Crystal Computer-generated Hologram Based on Photoalignment Technology

机译:基于光对准技术的液晶计算机全息图的平面度和衍射波前测量

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Interferometry with computer-generated hologram (CGH) has been widely used in the field of precision optical testingand metrology. CGH can easily generate reference wavefronts of any desired shape by controlling the phase of thediffracted light. Traditional CGH is made by etching a specific pattern on a substrate, whose cost is extremely high andthe phase of the diffraction wavefront is sensitive to the changes in etching depth. Based on photoalignment technology,liquid crystal (LC) can be fabricated into LC-CGH. The LC phase modulation elements made by this technology havethe advantage of low cost and high accuracy. The existing phase modulation elements based on photoalignmenttechnology are mostly qualitative phase controller, such as LC-grating and LC-wave plate. They are rarely used in highprecision applications. In the field of optical testing, the high precision of diffractive wavefront of LC-CGH is critical.The wavefront changes due to phase retardation in adjacent areas of LC-CGH is affected by the flatness of the LC film.Therefore, it is essential to keep the surface of the LC-CGH flat. In this paper, we measure the surface flatness and thediffraction wavefront of the LC-CGH to verify the feasibility of LC-CGH in optical testing. First, we introducephotoalignment technology and analyze the principle of LC-CGH. Second, we measure the surface flatness of LC-CGH.In the end, we evaluate the transmitted diffraction wavefront. The results can provide guidance for the LC-CGH processimprovement.
机译:带有计算机生成全息图(CGH)的干涉仪已广泛用于精密光学测试领域 和计量学。通过控制CGH的相位,CGH可以轻松生成任何所需形状的参考波前。 衍射光。传统的CGH是通过在基板上蚀刻特定的图案制成的,其成本非常高且 衍射波前的相位对刻蚀深度的变化很敏感。基于光对准技术, 液晶(LC)可以制成LC-CGH。这项技术制成的LC相位调制元件具有 成本低,精度高的优点。现有的基于光取向的相位调制元件 技术主要是定性相位控制器,例如LC光栅和LC波片。它们很少用于高 精密应用。在光学测试领域,LC-CGH衍射波前的高精度至关重要。 由于LC-CGH的相邻区域中的相位延迟而引起的波前变化受LC膜的平坦度影响。 因此,必须使LC-CGH的表面保持平坦。在本文中,我们测量了表面平整度和 LC-CGH的衍射波前,以验证LC-CGH在光学测试中的可行性。首先,我们介绍 光对准技术并分析了LC-CGH的原理。其次,我们测量LC-CGH的表面平整度。 最后,我们评估了透射衍射波前。结果可为LC-CGH工艺提供指导 改进。

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