Design and fabrication of x-ray Kirkpatrick-Baez microscope for ICF

摘要

A hard x-ray (8 keV, Kcc line of Cu) Kirkpatrick-Baez (KB) microscope was designed for the diagnostics of inertial confinement fusion (ICF). Three main parts including optical design, fabrication of multilayers, and alignment method were discussed in this paper. According to the deduced equation of aberration in whole field, an optical system was designed, which gives attention to not only spatial resolution but also the collection efficiency. Tungsten (W) and boron carbide (B4C) were chosen as multilayer materials and the non-periodic multilayer with 40 layers was deposited. The measured reflectivity by XRD is better than 18% in the bandwidth range of about 0.3%. Super accurately alignment is another difficulty in the application of KB microscope. To meet the requirements of pointing and co-focusing, a binocular laser pointer which is flexible enough was designed. Finally, an 8keV x-ray tube was used as source in x-ray imaging experiment and images with magnification of 2* were obtained.