Information Modeling for Computer-Supported MEMS Product Design and Development

摘要

In this paper, we present an information model for effective computer support to microelectromechanical systems (MEMS) product design and development. Specifically, we first identify the characteristics of MEMS product design and development processes and examines the state-of-the-art of MEMS CAD and simulation systems. We then propose an approach to modeling design and development processes of MEMS products and constructing a comprehensive knowledge repository in a fairly flexible and real-time manner. This approach is based on a core model and its extensions in a function-environment-effect-behavior-principle-state-form (structure) (FEEBPSF) framework. Information models are developed using UML and XML for MEMS or MEMS embedded product representations in a knowledge-intensive life-cycle management and engineering support environment. Throughout the paper, a micro fluidic dispensing system is used as an example to illustrate concepts and models described in the paper.