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The Study of Surface Microstructure of PPS Using as Antireflection Coating of Multi-crystalline Silicon Solar Cell

机译:多晶硅太阳能电池抗反射涂层PPS表面微观结构研究

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This paper describes the formation of PS n~+ / p / p~+ / Al structure on the PS / p polysilicon wafers. Saw damage etching and isotropic texturing combined in one processing step. The diffusion emitter junction was homogeneous emitter. The front surface metal grid and back metal contact were carried out by screen-printed metallization. The processing bottlenecks are how to form optimal surface morphology. These require that the depth and sizes of textured pores in PS must meet with the conditions of optimal contact between the interfaces. At the same time the PS coating also doesn't reduce its utility of antireflection. The most promising one is macro-porous layer production. We control the etching conditions and obtained the efficiencies by up to 8% in the condition of no additional bulk passivation processes, no PECVD SiN, ARC layer and no selective diffusion emitter.
机译:本文介绍了PS / P多晶硅晶片上的PS N〜+ / P / P〜+ / Al结构的形成。在一个处理步骤中看到抗损伤蚀刻和各向同性纹理。扩散发射极结是均匀的发射器。通过丝网印刷金属化进行前表面金属栅格和后金属触点。处理瓶颈是如何形成最佳表面形态的。这些要求PS中的纹理孔的深度和大小必须与接口之间的最佳接触条件相遇。同时,PS涂层也不会降低其抗反射效用。最有希望的是宏观多孔层生产。我们控制蚀刻条件,并在没有额外的散装钝化过程的条件下获得效率高达8%,没有PECVD SIN,ARC层,没有选择性扩散发射器。

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