VOLATILE ORGANIC COMPOUNDS MONITORING FOR SEMICONDUCTOR FOUNDRY CLEAN ROOM AIR

摘要

Air samples were collected in consecutive days using Summa canisters from semiconductor foundry clean rooms and air entrances. By coupling a NuTech pre- concentrator with an Agilent GC-MS, an optimized method for qualitative and quantitative analysis of VOC compounds was developed. Method detection limit (MDL), blank spike (BS) and blank spike duplicate (BSD), etc. were estimated for method validation. Identification and distribution of VOC species in various Fabrication modules were made and compared. Possible origins were discussed. Impacts of some species on semiconductor process were discovered. Furthermore, a preliminary research of wafer surface contamination was conducted.