Research on the System for High Precision-measurement on Rotor's Surface

摘要

Technology of measurement on the surface of rotor is presented. The single optic-fiber sensor via modulating intensity of light is used as measuring component, its sensitivity, precision, and repetition of the optic-fiber sensor are 2.5mV/μm 1% and 0.5% respectively verified in experiments. A system is designed for measuring surface of the rotor and its precision is 0.005μm. The constitute and working process of the system is introduced by experiments based on the solid rotor, which of diameter is 38mm. Two methods of drawing the surface image of useful rotor are Studied. They are Mercator chart and 3D surface repetition method. The 3D protracting chart of rotor's surface is described. Finally the negative influence of anomalous surface of rotor which was obtained from those charts is researched.