Performance of the PSD-Based Hartmann-Shack Wavefront Sensor

摘要

A novel PSD-based Hartmann-Shack wavefront sensor (HSWFS) prototype has been developed, which employs a 4X4 PSD array as the detector to measure the displacements of the sub-aperture spots. Compared with the conventional CCD-based HSWFS, it can operate at very high sampling rate, and it only has very short readout delay time. Our system can measure wavefront at frame rate up to 5KHz, and the detected wavefront error is less than λ /50 (λ = 632.8nm). In this paper the experimental results are given. The measurement error of the PSD-based HSWFS for a given aberrated plate is compared with the measure result of the Zygo interferometer.