ELECTROSTATIC MICRO-DEFORMABLE MIRRORBASED ON POLYMER MATERIALS

摘要

MOEMS-based electrostatic micro-deformable mirrors (MDM) are promising for futureAO systems. Original complete polymer mirrors have been designed for low drivingvoltage and high stroke, and first prototypes have been realized. Specific control-command strategy for the linearization of electrostatic actuation is presented and tested.Electrostatic MDM are well-suited for open-loop operation.