Nano Temperature Sensor Using Selective Lateral Growth of Carbon Nanotube Between Electrodes

摘要

This paper presents lateral growth of carbon nano tube (CNT) between two electrodes and its use as nano temperature sensor. Fabrication of electrodes is made by MEMS techniques. The CNT is grown selectively by MPCVD between two electrodes. After wire bonding, the grown CNT is tested and calibrated. Tie growth conditions of CNT, such as the flow rate of CH4 or N2 gas, are varied to obtain a high quality CNT sensor. SEM is used to observe the shape and structure of CNT, while Ramann spectrum analysis is used to indicate the degree of impurity and amorphrous structure in tie CNT. The i-Y curve of CNT is measured at different temperature, and a very linear relationship between the electric resistance of CNT and the temperature is obtained. This result indicates that CNT can be used as a very good temperature sensor.