Nano Temperature Sensor Using Selective Lateral Growth of Carbon Nanotube Between Electrodes

摘要

This paper presents lateral growth of carbon nanotube (CNT) between two electrodes and its use as nano temperature sensor. Fabrication of electrodes is made by MEMS techniques. The CNT is grown selectively by microwave plasma chemical vapor deposition between two electrodes. After wire bonding, the grown CNT is tested and calibrated. The growth conditions of CNT, such as the flow rate of CH4 or N2 gas, are varied to obtain a high-quality CNT sensor. SEM is used to observe the shape and structure of CNT, while Raman spectrum analysis is used to indicate the degree of graphitization or amorphous structure in the CNT. The I-V curve of CNT is measured at different temperature, and a linear relationship between the electric resistance of CNT and the temperature is obtained. This result indicates that CNT can be used as a temperature sensor