New fabrication method of metamaterial resonator by self-organization method

摘要

A new fabrication method of metal resonators on a quartz glass substrate for optical metamaterials is proposed in this paper. Minute metal resonators are useful for optical metamaterials, which have artificial optical properties that have not existed in nature. The proposed fabrication method in this paper is separated into two phases; fabrication of a first layer nano rod array on a quartz glass substrate, and fabrication of a double layer nano rod array. The first layer nano rod array is fabricated by combination of Au spatter deposition, grid patterning by the Nano Plastic Forming technology, and self-organization by thermal dewetting. The process conditions for the first layer nano rod array are optimized by investigating influences of thickness of Au film and annealing conditions on morphology of nano rods. Second layer nano rod array is formed by deposition of a SiO_2 layer, and thermal dewetting. The feasibility of the fabrication process of the double layer nano rod array is verified. Finally, magnetic resonance characteristic of the fabricated double layer nano rods array is discussed theoretically.