Hybrid Processes for Manufacturing of Multi-material Micro Parts

摘要

For the successful industrial implementation of Micro System Technology products, technologies for the production of medium and large numbers of components consisting of different materials must be available. This demand leads to the challenge of combining various processes (hybridization) in one sequence. Such methods might be different variants of replicative processes or even non-replicative technologies. Additionally, the requirements made on the materials can no longer be met by silicon or polymers only. For such cases, powder metallurgical technologies for processing of metals and ceramics have been developed. They represent economic manufacturing methods in case of medium and large scale series. Among various other process combinations two examples are described in detail: 2C micro powder injection moulding process allows not only to save considerable assembly expenditure, furthermore, it offers the principal possibility to create combinations of different or even contradictionary materials properties. A further variant combines casted tapes with adequate powder filled feedstocks offering additional possibilities for generating functionalized surfaces as well as for the application of powders containing nano-size particles (IML-PIM).