Validation of a New Process Chain for Producing Bulk Metallic Glass Replication Masters with Micro and Nano-scale Features

摘要

In order to satisfy specific functional and technical requirements, micro-components often possess both micro and nano scale structures. This characteristic is referred to as Function and Length Scale Integration (FLSI) in products. The most important requirement for achieving mass production of such micro-components is the design of viable manufacturing platforms for their cost effective fabrication. One of the most viable micro-fabrication technologies for the high-throughput production of micro-products is the micro-injection moulding (μIM) process. A key requirement for the successful application of this replication technology is the availability of precision production FLSI masters having a long lifetime and that can deliver a very high yield. In order to produce such masters, the capabilities of complementary and at the same time compatible manufacturing technologies are usually combined in process chains. When designing such chains it is necessary to utilise materials that facilitate the integration of the candidate manufacturing technologies, and at the same time satisfy the functional and technical requirements of the master. A recent experimental investigation of a process chain that is enabled by the use of Vit 1B bulk metallic glass (BMG) as a workpiece material, and whilst combining the capabilities of the PS laser ablation and FIB machining technologies proved that such a process pair is a viable route for producing replication masters incorporating micro and nano scale structures. This paper now reports the results obtained when the successfully structured Vit 1 B BMG workpiece, was utilised as an insert for the production of a batch of polymer parts by micro-injection moulding. In this context, this study therefore presents the experimental investigation to validate the microinjection moulding process step in the considered process chain.