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Influence of the Cutting Edge Geometry on the Tool Stress Distribution in Monocrystalline Silicon Punches for Microblanking of Thin Metal Foils

机译:切削刃几何形状对微孔薄金属箔微吹孔硅孔工具应力分布的影响

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The continuous demand for metallic micro parts in high quality results in the need of appropriate manufacturing methods. Profiting from the economic advantages and high workpiece quality of mechanical manufacturing methods like forming and blanking, the downsizing of tools is one major challenge in the application of these techniques. This study presents the use of monocrystalline silicon as tool material for blanking. The main reason for the application of this material is the possibility for the miniaturisation of silicon structures by etching down to 100 um and below, which is well-established in the microsystems technology. But to benefit from this knowledge the tool design has to be adapted due to the brittle material properties of silicon. In experimental blanking tests on copper foils with a thickness of 20 um tool wear in form of outbreaks occurs at the cutting edge. The analysis of this blanking process with a wear-modified cutting edge by finite element method shows a shift of critical tensile stresses in the punch in a direction opposite to the wear-free cutting edge. This is in accordance to the experimental results, as in this area new outbreaks begin. These results are transferred to a defined cutting edge modification for a material-adapted tool design. A chamfer and a radius at the cutting edge result in significantly lower tensile stresses in the silicon punch.
机译:在高质量中对金属微零件的连续需求导致需要适当的制造方法。利用经济优势和高工件质量的机械制造方法,如成型和消隐,工具的缩小尺寸是应用这些技术的一个主要挑战。本研究表明,使用单晶硅作为用于消隐的工具材料。应用该材料的主要原因是通过蚀刻到100μm和下方的硅结构小型化的可能性,这在微系统技术中良好地建立。但是,从本知识中受益,工具设计必须由于硅的脆性性质而调整。在实验的消隐测试中,在爆发形式的厚度为20μm工具磨损的铜箔中发生。通过有限元方法对具有耐磨切削刃的该消隐工艺的分析显示了与无耐磨切削刃相反的方向上的冲头中的临界拉伸应力的偏移。这是根据实验结果,如在这个领域的新爆发开始。这些结果转移到用于材料适应的工具设计的限定切削刃改性。倒角和切削刃的半径导致硅冲孔中的显着降低的拉伸应力。

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