COLD FORGING METHOD FOR POLYMER MICROFABRICATION

摘要

Polymer microfabrication using cold forging method was investigated. The advantage of cold forging is that the cooling stage in thermoplastic molding is eliminated, thus facilitating rapid production of plastic microstructures. High aspect ratio microchannels (100μm x 500 μm) were fabricated on Teflon substrates. The dimension of replicated channels was found to be consistent from shot to shot. Due to instantaneous elastic recovery, the channel has a width about 30% smaller than that on the die. The final channel size is contingent upon the forging pressure, the forging speed, and the dwell time, as well as on the post relaxation process. Upsetting experiments of Teflon cylindrical samples were carried out to study the fundamental issues on dimensional recovery so as to predict and consequently control the dimensional changes in polymer micro forging.