Analysis and usage of data from surface inspection systems

摘要

A comprehensive exploitation of ASlS-data offers a large potential for optimizing the ASIS itself, as well as the up- and downstream processes. Here the application of flexible and easy-to-use tools to manage the huge amount of available data is indispensable. In this way, the ASIS-measurements do not become useless data graves but mark a significant means for optimising the final surface quality as well as improving the processes in terms of yield and efficiency.