Machining characteristics with nanometer-cutting machine equipped parallel mechanism

摘要

In this paper, the machining characteristics of the nanometer-cutting was discribed. The conclusions can be drawn as follows. (1). Pockets were machined by scratching acrylic resin with an AFM probe. (2). Because the stiffness of the probe is anisotropic, the machining accuracy depended on the scratch direction. (3). The additional vibration helps to decrease the ridges on the boundary of the machined area.