Present Situation and Developing Trend of Abrasive Air Jet Micromachining

摘要

This paper briefly introduced the principle and technology development of Abrasive Air Jet Micromachining (AAJM). AAJM is able to create fast and inexpensive 3-dimensional microstructures of brittle materials. The application fields of AAJM are expanding widely over electronic parts, semiconductor and small parts of MEMS, The advantages and challenges are discussed.