High quality ZnO films on sapphire substrates were synthesized using metal organic chemical reactions, such as metal organic chemical vapour deposition (MOCVD) and metal organic decomposition (MOD) method. Stable solid source of Zn-acetylacetonate was used for MOCVD, and the sol-gel method from Zn-acetate, 2-methoxyethanol and 2-aminoethanol, and a commercial MOD source from Symetrix Co. were used for MOD. Dominant excitonic emission was obtained from these layers synthesized by these simple and economical methods, which are expected to develop powerful techniques for functional oxide fabrications.
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