Improved emission intensity of rare gas flow excimer lamps

摘要

Excimer lamps are widely used in industrial applications. For instance, large glass substrates for liquid crystal displays are preferable to be cleaned with dry and low temperature process. VUV/O3 surface cleaning process is essential to such material processings [1,2]. Xenon excimer lamps are optimum light sources because they radiate powerful VUV emission at around 172nm through the quart outer bulbs.