Multi-filament simulation in Xe Dielectric Barrier Discharge excimer lamp using two dimensional fluid model

摘要

Dielectric barrier discharges (DBDs) have been applied to many industrial fields, such as ozone generation, decomposition of pollutant gases and light sources. For VUV light source, DBD excimer lamp is one of the most important and convenient VUV light sources[l][2] for photo-chemical, semiconductor, evironmental and flat display panel industries. Many experimental researches have been done on DBD excimer lamps, however, the discharge development and microscopic discharge characteristics are still unknown. To make more efficient lamp, it is necessary to understand the discharge properties. So recently, necessity of precise simulation[3][4] has been raise to clarify the discharge development and microscopic characteristics. The present simulation has been done by using two dimensional fluid model, and multi-filament DBD excimer lamp is simulated. The simulation started from a small electron-ion cluster, and three filaments are self-formed in the gap. The discharge development of multi-filament discharge has been investigated.