E to H-mode Transition in Cylindrical Tube ICP Discharge for Light Sources

摘要

Recently, there has been a steadily interest in the application of RF (Radio frequency) ICP (Inductively Coupled Plasma) sources for numerous plasma processing such as etching, deposition and etc. One of the most important advantages of ICP is that R.F Power interacts with the plasma by displacement currents, rather than true currents, and thus it can be delivered without an electrodes in contact with plasma [1]. With considering this advantage, we applied ICP discharge in developing electrode-less light sources.