We have developed an easy fabrication technique for micro paraffin actuator with a size of 13 * 20 * 0.5 mm~3. The actuator is composed of stainless plate and polyimide sheet as a structural material, parylene-C membrane as a valve membrane and sealer and paraffin as an actuation medium. The deflection of the actuator is as high as 140 μm at the applied voltage of 16 V. We designed and fabricated the microvalve utilizing the micro paraffin actuator. The microvalve fully closed at the applied voltage over than 12 V. The response time of the microvalve is less than 10 seconds for closing and less than 60 second for opening. The flow rate at the closed state is less than 0.1 seem and the open/close ratio is achieved to more than 1000 at the inlet pressure range of 0-100 kPa and applied voltage of 16 V.
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