Null-Test-Measurement of Cylindrical Microlenses in Transmitted Light

摘要

A fiber optic Mach-Zehnder-interferometer is described, which allows the test of cylindrical microlenses with a high numerical aperture in transmitted light. The interferometer is working in the near infrared and uses diffractive optical elements as null lenses providing a reference cylindrical wave. The setup, the null-optic, the light source and a method to eliminate misalignment aberrations are described in detail and a typical measurement sequence is presented.