Development of micromachine technology requires nano-CMM (coordinate measuring machine) to evaluate micromachine components. For this requirement, we have suggested novel probing technique using an optically trapped particle in air. In this paper, we implement the improvement of the stability of the trap using annular profile beam. Annular beam is generated by two different methods of a circular opaque disk and an axicon. Their characteristics are compared, and we measure the three dimensional trapping conditions such as minimum trapping power in annular beam trapping in air. Achievement of improvement of optical trap characteristics enables the oscillation of a probe particle by external excitation, and we demonstrate the performance as the positional sensing probe.
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