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Integrated Maintenance Scheduling for Semiconductor Manufacturing

机译:半导体制造的集成维护调度

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摘要

Tools in a manufacturing plant require regular maintenance over their lifespan (e.g. cleaning, calibration, safety checks) in order to keep them running smoothly. In capital intensive industries, such as semi-conductor manufacturing, the scheduling of maintenance operations on the tools used in production is a critical function. Maintenance operations can be expensive to perform, so we should only perform them when necessary. However if maintenance is delayed too long, tools may run sub-optimally or break down (thus requiring even more expensive unplanned, corrective maintenance). Furthermore a tool that is undergoing maintenance may be partly or wholly unavailable for (revenue generating) production operations.
机译:制造工厂的工具需要定期维护其寿命(例如清洁,校准,安全检查),以便使它们顺利地运行。在资本密集型产业(如半导体制造)中,生产在生产中使用的工具的调度是一个关键功能。维护操作可以执行昂贵,因此我们应该只在必要时执行它们。然而,如果维护延迟太长,则工具可能会使次优先或分解(因此需要更昂贵的计划计划,纠正维护)。此外,正在进行维护的工具可能部分或完全不可用于(收入)生产操作。

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