Monitoring of Organics Removal In High Purity Water Production From Reclaimed Sewage

摘要

The organic transformation and reduction in a typical ultrapure water system was investigated in this study which was done with advanced water reclamation to recover water for use in semiconductor industry. The secondary effluent from the activated sludge treatment plant was purified by dual membrane technologies and this reclaimed water was taken as the feed source for pilot performance trials conducted for over a year on an ultrapure water system. The results demonstrated that ultrapure water of the quality desired by the semiconductor industry could be produced reliably from the reclaimed water.