DIAGNOSE AND REMEDY A LAMINARITY PROBLEM IN AN INCORRECTLY DESIGNED CLEANROOM

摘要

A wide sidewall return cleanroom designed with insufficient length of sidewall return air grilles was examined. The cleanroom was extremely hard, almost impossible, to be balanced to required laminarity level due to its wide span and insufficient space length of return air grilles. Computational Fluid Dynamics (CFD) technique was used to examine the airflow patterns in the cleanroom. The analysis results were used to guide the remodeling effort. A significant improvement on laminarity was achieved in the modification project.