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An Ultrahigh Vacuum Gauge Calibration System using an Absolute Pressure Gauge

机译:使用绝对压力表的超高真空仪校准系统

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A system for calibrating vacuum gauges in the pressure range 1mbar to 10~(-7) mbar using a Spinning Rotor Gauge is presented. The reference gauge is an absolute pressure gauge and is traceable to international system on S.I. units, calibrated by German Calibration Service DKD-K-04601. The chamber design allows upto 4 different vacuum gauges to be calibrated simultaneously against the Spinning Rotor Gauge over 6-decades. The sensitivities of the gauges for different gases at different pressures could be measured by introducing different gases through a leak valve connected to the system. The main factors influencing the design of the vacuum chamber along with the preliminary results of the functioning of the system are presented. The systematic errors and uncertainty in the calibration procedures are estimated to be about ± 6%.
机译:提出了一种用于校准压力范围内的真空仪1mbar,使用纺纱转子计校准压力范围为10〜(-7)曼巴。参考量表是绝对压力表,可追溯到S.I的国际系统。单位,由德国校准服务DKD-K-04601校准。腔室设计允许高达4种不同的真空测量仪同时校准旋转转子计超过6分。通过通过连接到系统的泄漏阀引入不同的气体,可以通过引入不同的压力来测量不同压力下的不同气体的敏感性。提出了影响真空室设计的主要因素以及系统运行的初步结果。校准程序中的系统误差和不确定性估计为约±6%。

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